Vacuum valves

Two connections required as accessories, Bellows-sealed, Service life: 1.5 million operating cycles

Bellows-sealed, Normally closed (n. c.), Two connections required as accessories, Service life: 1.5 million operating cycles, Variants: EVI 005 P = pneumatic (without pilot valve); EVI 105 P = electro-pneumatic (with pilot valve)

Closable without changing the gas flow setting, Optimum characteristic, Digital position display, Excellent reproducibility, Extremely small dead volume, Very large control range

With elastomer seals for high vacuum operation, Stainless steel body with welded diaphragm bellows, Conductance continuously variable with handwheel (multi-turn), Fully retracting and opening, Additional O-ring materials available

Single acting, normally open (spring to open/air to close), With elastomer seals for high vacuum operation, Additional bellows segments increase the service life, Can be operated in any orientation, Additional O-ring materials available

With elastomer seals for high vacuum operation, Stainless steel body with welded diaphragm bellows, Conductance continuously variable with handwheel (multi-turn), Fully retracting and opening, Additional O-ring materials available

Single acting, normally open (spring to open/air to close), With elastomer seals for high vacuum operation, Additional bellows segments increase the service life, Can be operated in any orientation, Additional O-ring materials available

With elastomer seals for high vacuum operation, Stainless steel body with welded diaphragm bellows, Conductance continuously variable with handwheel (multi-turn), Fully retracting and opening, Additional O-ring materials available

Single acting, normally open (spring to open/air to close), With elastomer seals for high vacuum operation, Additional bellows segments increase the service life, Can be operated in any orientation, Additional O-ring materials available